Tail gas treatment equipment can handle gases used in etching processes and chemical vapor deposition processes in the semiconductor, liquid crystal, and solar energy industries, including SiH4, SiH2Cl2, PH3, B2H6, TEOS, H2, CO, NF3, SF6, C2F6, WF6, NH3, N2O, and so on.
Exhaust gas treatment me...
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