How to deal with gas exhaust in the special gas pipeline

With the booming development of the semiconductor industry, higher requirements have been put forward for its supporting projects. The supply of special gases has not formed an effective system, and the problems of messy cylinders, chaotic management and mixing of incompatible gases are more serious, which greatly affects the safety of gas consumption. So how to deal with the gas tail gas in the special gas pipeline project? Today the staff of Shenzhen Wofei Technology Co:

Special gas tail gas treatment

Special gases on health and the environment will produce great harm, how to deal with special gas tail gas, with what equipment, here will be an in-depth introduction.

Status of speciality gas tail gases

Tail gas inevitably exists as a derivative of the special gas system. In the past, in many colleges and universities, due to the laboratory gas consumption is not large, the owner of the construction unit is not fully aware of the tail gas emission problem, with more semiconductor factories springing up, the production of special gas tail gas emission more and more attention. Then how to discharge, how to discharge has become a problem in front of many users.

The treatment method of the tail gas emission treatment device of the special gas system:

The type of tail gas treatment device should be selected according to the characteristics of the special gas in the exhaust to be treated, and incompatible special gases should be separately set up tail gas treatment device;.

Tail gas treatment device should be arranged close to GR, GC and other special gas equipment.

The tail gas treatment method of special gases shall adopt dry treatment adsorption, wet scrubbing, heating decomposition treatment, combustion treatment, plasma decomposition treatment, dilution treatment and the combination of the above methods.