The use of gases in the semiconductor industry dates back to the early 1950′s to 1960′s. During the semiconductor manufacturing process, gases are mainly used to clean and protect semiconductor materials to ensure their purity and quality. Among the most commonly used gases are nitrogen and hydrogen.
As semiconductor technology developed and manufacturing processes continued to improve, the demand for gases increased. In 1970, further development of semiconductor manufacturing technology, the application of gases in key processes such as etching and deposition of thin films gradually increased, and fluoride gases (e.g. SF6) and oxygen became commonly used etching and deposition gases. 1980 saw a further increase in the demand for gases with the development of integrated circuits and the increase in demand for them. Hydrogen was widely used in the manufacturing process, including hydrogen annealing and hydrogen vapour deposition. And from 1990 to the present, the demand for high-purity gases and specific gases has increased as semiconductor device sizes have continued to shrink and new processes have been introduced. For example, the application of extreme ultraviolet lithography (EUV) requires the use of extremely high-purity gases such as nitrogen and hydrogen.
Semiconductor gas continues to increase with the development of related products driven by more and more products are revealed, while the gas also belongs to the source of danger, so the products used for gas decompression, gas detection products and prevent gas leakage products have emerged such as pressure regulators, gas valves, gas pressure gauges, gas leakage detector, etc., and their roles are as follows:
Pressure regulators: Pressure regulators are devices used to control gas pressure. They usually consist of a regulator valve and a pressure sensor. Pressure regulators take a high pressure gas input and stabilise the pressure of the output gas by adjusting the valve to meet specific application requirements. Pressure regulators are widely used in areas such as industry, manufacturing and laboratories, as well as in the semiconductor industry, among others, to ensure the stability and safety of the gas supply.
Gas Valves: Gas valves are used to control the flow of gases and to close gas passages. They usually have an on/off function that opens or closes the gas flow. There are various types of gas valves, including manual valves, electric valves and pneumatic valves. They are widely used in gas systems to control the flow, pressure and flow rate of gases.
Gas Pressure Gauges: Gas pressure gauges are used to measure the pressure level of a gas. They are usually installed at critical locations in gas systems to monitor pressure changes and ensure that they are within safe limits. Gas pressure gauges are widely used in industry, manufacturing and laboratories, and the semiconductor industry has also been involved.
Gas Leak Detectors: Gas leak detectors are used to detect leaks in gas systems. They detect the presence of gas leaks and sound an alarm so that timely action can be taken to prevent leakage accidents. Gas Leak Detectors are widely used in industrial, chemical, oil and gas applications, and the semiconductor industry has also been involved.
Post time: Feb-20-2024