Applicable gases: Flammable, corrosive, toxic gases such as SiH4, NF3, NH3, N2O, HCL, etc.
Applicable industries: semiconductor, TFT Sun Solar, LED, research institutes, university laboratories, etc.
Our valve box has a fully automatic semi-automatic and manual need to know please contact our customer service Thank you!
Gas valve manifold boxes (VMBs) are designed to take a single source gas and distribute to multiple tools and be able to service components within the VMB with vent and purge features to safely change out or remove the gas stick without takings all you tools down. Valve manifold boxes serve as distribution box or may allow multiple compatible gases to enter and exit with the ability to vent and purge while other processes are still running. These boxes are designed to be as simple as gas isolation box or vent and purge stick assemblies with devices to monitor life safety events, such as high pressure, excess flow to trigger emergency shutoff valves all monitor with PLC based controllers.
Specialty gas manifolds are useful in many applications and industries including semiconductor, medical, and pharmaceutical applications. They are usually paired with a pressure regulator that reduces the pressure within the gas valve manifold to an appropriate operating range along with gauges, transducers, and mass flow meters / controllers to monitor.
Advantages of Pneumatic Valve Boxes
Gas valve manifold boxes are a secure and extremely affordable way of connecting single source gas to multiple distribution points or multiple compatible gases to single process tools. They are affordable and useful for eliminating multiple boxes to each tool centralizing the gasses and saving valuable fab space.
VMBs provide numerous benefits for the user, including:
Choosing the Right Gas Valve Box
When choosing a valve manifold system, there are a few specifications to consider based on the intended application. These include:
Specialty Gas Manifold Custom Options
If our standard manifold box assemblies do not meet your application and/or performance requirements, our team can create a custom solution that matches your specifications. Custom gas boxes are configured to accommodate your specific needs for:
Gas type
Flow rate
Delivery Pressure
Additional features and accessories can be added to valve manifold boxes to further improve its performance. These include:
Benefits of Valve Manifolds
Q1: Is the flow rate of the pressure reducer adjustable?
A:Yes, we can adjust it according to your needs and choose the model.
Q2:What products can you provide?
A:We can supply pressure reducers (for inert, toxic and corrosive gases), diaphragm valves (Class BA and EP), couplings (VCR and conventional), needle and ball valves and check valves (ferrule, internal, external and G-tooth available), cylinder couplings, etc.
Q3:Can you provide samples to test? For free?
A:We can provide free samples, and due to their high value, you should bear the cost.
Q4:Can you make the products based on our requests, such as connection, thread, pressure and so on?
A:Yes, We have experienced techincal team and can design and produce the products according to your requirements. Take a pressure regualtor for example, we can set the range of pressure gauge according actual working pressure, if the regulator is connected to a gas cylinder, we can add an adaptor such as CGA320 or CGA580 to connect the regulator with the cylinder valve.
Q5:What payment methods for chose?
A: For small order, 100% Paypal, Western Union and T/T in advance. For bulk purchase, 30%T/T, Western Union, L/C as deposit, and 70% balance paid before shipment.
Q6:How about the lead time?
A:Usually, delivery time is 5-7 working days for sample, 10-15 working days for mass production.