1 | Max.working pressure 20.6 Mpa. |
2 | Max. working temperature 204℃ (High temperature environment up to 454℃,at this time the sealing material is replaced with expanded graphite) |
3 | Filter system Particulate pollutants, gases, liquids are applicable. |
4 | Stainless steel powder metallurgy sintered filter filter accuracy 2μm~40μm |
5 | Filter flow 1x 10 -6~1×10-2L/min. cm2. pa |
6 | Filter can be changed. |
Product features of Filter
1 | Wide application range, flow range from 15 to 300SL / min. |
2 | It has good compatibility with most high-purity semiconductor process gases. |
3 | 3 nanoparticle filtration capacity maintains high flow efficiency and ultra-small pressure drop. |
4 | 5Ra electropolished surface can prevent internal pollution. |
5 | Bake with hot nitrogen after deionized water to meet semiconductor process standards. |
6 | 1000 level dust-free aseptic workshop manufacturing, cleaning and packaging environment. |
7 | Test for 100% helium leakage. |
Inlet | Outlet | |
1 | 1/8″ tube fitting | 1/8″ tube fitting |
2 | 1/4″ tube fitting | 1/4″ tube fitting |
3 | 3/8″ tube fitting | 3/8″ tube fitting |
4 | 1/2″ tube fitting | 1/2″ tube fitting |
5 | 6MM tube fitting | 6MM tube fitting |
6 | 8MM tube fitting | 8MM tube fitting |
7 | 10MM tube fitting | 10MM tube fitting |
8 | 12MM tube fitting | 12MM tube fitting |
9 | 1/8″ Female NPT | 1/8″ Female NPT |
10 | 1/4″ Female NPT | 1/4″ Female NPT |
11 | 1/4″ Male NPT | 1/4″ Male NPT |
12 | 3/8″ Male NPT | 3/8″ Male NPT |
13 | 1/2″ Male NPT | 1/2″ Male NPT |
Product Performance Parameters of Filter
1 | Filtering Accuracy | ≥0.0025μm | |
2 | Filtration efficiency | Removal rate99.99999%≥0.0025μm | |
3 | Rated flow | 15L/Min | |
4 | 60L/Min | ||
5 | 120L/Min | ||
6 | 200L/Min | ||
7 | 300L/Min | ||
8 | Filter composition | filter element | 316L/PTFE |
9 | housing | stainless steel 316L | |
10 | Working conditions | Maximum inlet pressure | 21Mpa(310kgf/cm2) |
11 | Maximum differential pressure | 15Mpa(153kgf/cm2) | |
12 | Maximum operating temperature | 430℃(inert gas) | |
13 | Helium leakage rate | 1×10-9 atm.cc/sec | |
14 | Surface finish | ≤Ra 5μin |